Vacuum Degree : 2.0 x 10-1torr Ion Current : 1 ~ 10mA (1mA/step) Target Material : Au or Pt
Features
▶ Easy Operation with 7” Touch Screen
▶ Vacuum-Auto Coating-Vent w/ One Touch Operation
▶ Parameter Saving with Library Function
▶ 7 Sample Stubs(Φ14mm) Together in Chamber
▶ Prevent damage to Specimens(Low Current:1~10mA)
▶ Minimize Footprint with Compact Product Size
▶ Very Good Uniformity with Pirani Gauge Inside
Specification
Vacuum Degree : 2.0 x 10-1torr
Ion Current : 1 ~ 10mA (1mA/step)
Target Material : Au or Pt
Chamber Size : Φ140mm(D) x 100mm(H)
Sample Stage : Φ50mm(D) x 30mm(H)
Target Size : Φ50mm(D) x 0.1(T)
Sputter Time : 1 to 600sec (1sec/step)
Vacuum Pump : 100L/min, Rotary Pump, 23kg
Power : 220VAC ±10%, 50/60Hz Single Phase. Max. 10A
Dimension : 380(W)x 240(D) x 250(H)mm, 10kg
> Product > SEM and Coater
