Vacuum Degree : 2.0 x 10-1torr Ion Current : 1 ~ 10mA (1mA/step) Target Material : Au or Pt
How To Use
①Turn Power button on and put the sample on stage
②Timer setting (Initial vacuum: 2min, then coating time: 3min to 6min)
(example, if set 3min, 2min Vacuum time and 1min coating time)
③Check the lid close surely then Turn Start button on
④Please check whether the display on discharge current is 10~40mA after coating starting
⑤After coating complete, please open the lid then check the sample on stage,
and usually coated 20~30nm/min(at Discharge Current 25mA & Au Target).
Specification
Vacuum Degree : 2.0 x 10-1torr
Ion Current : 1 ~ 10mA (1mA/step)
Target Material : Au or Pt
Chamber Size : Φ120mm(D) x 65mm(H)
Sample Stage : Φ50mm(D) x 10mm(H)
Target Size : Φ50mm(D) x 0.1(T)
Sputter Time : 1min to 4min (Initial vacuum: 2min)
Vacuum Pump : 10L/min, Rotary Pump (Embedded)
Power : 220VAC ±10%, 50/60Hz Single Phase
Dimension : 380(W) x 180(D) x 350(H)mm, 17kg
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