1. Flash and Pulse Mode 2. FTM (Film Thickness Monitor) 3. Sample and Source
Features
1. Flash and Pulse Mode
Flash mode can cause thermal damage to heat-prone samples during thermal evaporation, but setting fire time,
interval time and also fire count using pulse mode can reduce thermal damage and form a more uniform thin film.
2. FTM (Film Thickness Monitor)
The equipment is turned Power on, and then Fire time, Interval time, and Fire count are set and when Start button is
turned on, the coating is operated to the set value, and the equipment is automatically turned off when the set coating
thickness is reached.
Built-in 0.1nm Unit Monitoring and Coating Thickness Control
3. Sample and Source
Top sample / Bottom Source
The source is mounted on the bottom and the sample stage is mounted on the top, and the coating is performed
on the sample located on the top. Therefore, the advantage is that the sample is not contaminated by carbon debris
generated from Carbon Fiber.
Carbon Fiber : 1.3mm(D), 1m installed
Specification
Down Vacuum Degree : 1.0 x 10-5mbar
Evaporation Method : Flash or Pulse selectable
Carbon Fiber : 1.3mm(D), 1m installed
Chamber Size : Φ150mm(D) x 160mm(H)
Sample Stage size : Φ 50mm(D) x 10mm(H)
FTM : 0.1nm Unit Monitoring and Thickness Control
Vacuum System : Turbo and Rotary Pump
Power : 220VAC, 50/60Hz Single Phase
Dimension : 270x285x405mm (WxLxH)
Weight : 15Kg (without Rotary Pump)
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